Atomic Layer Deposition of Aluminum Sulfide: Growth Mechanism and Electrochemical Evaluation in Lithium-Ion Batteries | Chemistry of Materials
Surface functionalization on nanoparticles via atomic layer deposition - ScienceDirect
Atomic Layer Deposition of Nanostructured Materials | Wiley
Atomic Layer Deposition - an overview | ScienceDirect Topics
Application of three-dimensionally area-selective atomic layer deposition for selectively coating the vertical surfaces of standing nanopillars | Scientific Reports
A review of atomic layer deposition modelling and simulation methodologies: Density functional theory and molecular dynamics
Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
Advances in Atomic Layer Deposition | SpringerLink
Atomic Layer Deposition — Institut für Mikrosystemtechnik - IMTEK
Atomic layer deposition for nanofabrication and interface engineering - Nanoscale (RSC Publishing)
Conformality in atomic layer deposition: Current status overview of analysis and modelling: Applied Physics Reviews: Vol 6, No 2