Thickness scaling of atomic-layer-deposited HfO2 films and their application to wafer-scale graphene tunnelling transistors | Scientific Reports
Hafnium (IV) oxide obtained by atomic layer deposition (ALD) technology promotes early osteogenesis via activation of Runx2-OPN-
Schematic diagram of one cycle of atomic layer deposition (ALD) of... | Download Scientific Diagram
Influence of high energy ion irradiation on structural, morphological and optical properties of high-k dielectric hafnium oxide (HfO2) thin films grown by atomic layer deposition - ScienceDirect
Atomic Layer Deposition of Hafnium Oxide on InAs: Insight from Time-Resolved in Situ Studies | ACS Applied Electronic Materials
Hafnium oxide films by atomic layer deposition for high-κ gate dielectric applications: Analysis of the density of nanometer-thin films: Applied Physics Letters: Vol 86, No 7
Hafnium Oxide/Graphene/Hafnium Oxide-Stacked Nanostructures as Resistive Switching Media | ACS Applied Nano Materials
Atomic Layer Deposition of Hafnium Oxide on InAs: Insight from Time-Resolved in Situ Studies | ACS Applied Electronic Materials
Temperature-Dependent HfO2/Si Interface Structural Evolution and its Mechanism | Nanoscale Research Letters | Full Text
Hafnium (IV) oxide obtained by atomic layer deposition (ALD) technology promotes early osteogenesis via activation of Runx2-OPN-mir21A axis while inhibits osteoclasts activity | Journal of Nanobiotechnology | Full Text
In-situ Atomic Layer Deposition growth of Hf-oxide Von der Fakultät für Mathematik, Naturwissenschaften und Informatik der Bra
Atomic layer deposition of HfO2 films using carbon-free tetrakis(tetrahydroborato)hafnium and water: Journal of Vacuum Science & Technology A: Vol 38, No 4
Atomic layer deposition of hafnium oxide from tert-butoxytris(ethylmethylamido)hafnium and ozone: rapid growth, high density and thermal stability - Journal of Materials Chemistry (RSC Publishing)
Comparison of hafnium dioxide and zirconium dioxide grown by plasma-enhanced atomic layer deposition for the application of elec
Self-cleaning and surface chemical reactions during hafnium dioxide atomic layer deposition on indium arsenide | Nature Communications
Atomic layer deposition of hafnium oxide dielectrics on silicon and germanium substrates | SpringerLink
Crystals | Free Full-Text | Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials | HTML
Atomic Layer Deposition principle (Reproduced with permission from ref. 9). | Download Scientific Diagram
ASM P8200/P3000 Atomic Layer Deposition (ALD) tool
Animation of atomic layer deposition of hafnium oxide - YouTube
Atomic layer–deposited nanostructures and their applications in energy storage and sensing | Journal of Materials Research | Cambridge Core
The Use of Atomic-Layer Deposition to Study How Surface Effects Impact Tritium Uptake
Growth mode evolution of hafnium oxide by atomic layer deposition – topic of research paper in Nano-technology. Download scholarly article PDF and read for free on CyberLeninka open science hub.
